Leica DM3 XL
Leica DM3 XL microscope inspection system for defect and failure analysis
The system offers 30% more field of view. With a large field of view, the DM3 XL inspection system allows your team to identify defects faster and increase your yield rate
To rapidly scan large components up to 6’’, the DM3 XL provides a unique macro objective. With a magnification of 0.7x it captures a field of view of 35.7 mm at once - 30% more than compared to other conventional scanning objectives
TThe DM3 XL uses LED illumination for all contrast methods. LED illumination provides a constant color temperature and offers real color imaging at all intensity levels.
With a long lifetime and low power consumption, LEDs also have an enormous cost savings potential
DM3 XL provides optimal excellence at an affordable price.
No matter what sample size and sample type you want to inspect, you can choose from a variety of stage inserts
Simplifying the basic setting of resolution, contrast, and depth of field, the Color Coded Diaphragm Assistant (CCDA) helps to speed up your work and minimize operational errors.
- 30% more field of view
- Reliably detect insufficient development at the edge or within the center of a wafer
- Detect uneven radial film thickness
- True-to-life color imaging at all intensity levels
- No bulb exchange – no down-time
- Reproducible results
- Detect micro-scratches or small particles in lower layers of the sample with in-depth darkfield contrast
- Variety of samples – variable stage inserts
- Adjust the microscope to different body heights with variable ErgoTubes and focus knobs
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