Programmable Power Turret (PPT): The three tube lens selection provides three magnification levels with the same objective lens. Replacement objective lenses allow a wide range of magnifications to support a variety of measurements.

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Tracking Auto Focus (TAF): The TAF feature focuses continuously, adjusting to changes in the object's height being measured. Automatic tracking of surface waves and warpage (in the Z-axis height direction) improves measurement throughput. The feature also cuts out the hassle of focusing during manual measurement, reducing the work burden for measuring system operators. Note: it does not perform Continuous measurement of displacement.

Programmable Ring Light (PRL): Fine control of obliquity and direction provides illumination optimal for measurement. Obliquity can be arbitrarily set in the range from 30° to 80°. This type of illumination is effective for enhancing the edge of inclined surfaces or very small steps. It can control independently illumination in every direction, front and back, right and left. Measurement with edge enhancement is possible by forming a shadow by lighting from only one direction.