Life Science
Industrial
Clinical
Educational
Forensic
Semiconductor
   •INM 100 - Manual 8"
   •INM 200 - Automated 8"
   •INM 300 - Manual 12" w/DUV
Imaging/Video/Software
X-Ray
Work Stations/Benches
Laser Surface Profiling


The Leica INM100 is a Leica semiconductor microscope for versatile routine inspection of masks and wafers.

The microscope's most impressive features are its ultra high optical performance, ergonomy, and easy, safe operation. Specially designed to meet the criteria for contamination Class 1, the INM 100 has a modular concept which allows effortless adaption to your individual application.


  • Automatic aperture diaphragm setting optimally matched to the objective in use
  • Completely new incident light axis with distinctly improved darkfield for maximum contrast and extremely good detail resolution
  • Trinocular tube with upright, laterally correct image and adjustable viewing angle from 0 degr. to 35 degr.
  • Fine focus drive switchable in two steps for optimal focusing
  • Adjustable height stop to protect samples
  • Manual stage with 8 inch capability in incident and transmitted light
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