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The KLA-Tencor INM100 is a KLA-Tencor semiconductor microscope for versatile routine inspection of masks and wafers.
The microscope's most impressive features are its ultra high optical performance, ergonomy, and easy, safe operation. Specially designed to meet the criteria for contamination Class 1, the INM100 has a modular concept which allows effortless adaption to your individual application.
- Automatic aperture diaphragm setting optimally matched to the objective in use
- Completely new incident light axis with distinctly improved darkfield for maximum contrast and extremely good detail resolution
- Trinocular tube with upright, laterally correct image and adjustable viewing angle from 0 degr. to 35 degr.
- Fine focus drive switchable in two steps for optimal focusing
- Adjustable height stop to protect samples
- Manual stage with 8 inch capability in incident and transmitted light
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