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The KLA-Tencor INM200 UV is a high-performance, ergonomically designed, Class one cleanroom review microscope. The high performance microscope system, capable of handling samples up to 200mm, may be equipped with the following imaging methods — Brightfield, Darkfield , DIC and 365nm UV imaging, with a resolution down to 0.13µm.
The combination of automation sequencing and the most advanced imaging methods make the INM200 high performance UV microscope ideal for review of critical wafers, masks and other substrates in failure analysis and production process control.
- A field-proven optimum corrected optical system provides the highest resolution, sharpness and contrast in all imaging modes
- A motorized encapsulated nosepiece with centerable objective slots allows contamination free and paraxial magnification change
- Real-time laser auto-focus with a safety upper end-switch for sample protection consistently provides a crisp image
- Objective magnification range from 1.25x to 150x
- A programmable field and aperture diaphragm maximizes image contrast and repeatability for sensitive metrology, image analysis and critical video applications
- Sample stages: manual and scanning stages 6”x6” or 8”x8”
- Microscope functionality can be computer interfaced via RS232 for OEM applications
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