
Bruker SEM Detectors | EDS, EBSD, & Micro-XRF Solutions
Bruker offers a comprehensive portfolio of EDS (Energy Dispersive Spectroscopy), EBSD (Electron Backscatter Diffraction), and micro-xrf (X-ray fluorescence) detectors, delivering high precision, speed, and sensitivity for scanning electron microscopes. Designed for both tabletop and full size SEMs, Bruker detectors enable advanced elemental and crystallographic analysis for applications in materials science, electronics, and manufacturing.
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Bruker EDS Detectors for SEM
Bruker’s EDS detectors provide reliable, high-resolution elemental analysis for research and industry. Options are available for both tabletop SEMs and full size SEMs.
- XFlash 730 EDS with ESPRIT Compact – Factory-installed, high-sensitivity EDS system for efficient routine analysis (for compact floor standing SEM’s i.e. Coxem CX200/CX300).
- QUANTAX Compact 30 XFlash EDS – Compact EDS solution designed for reliable, entry-level elemental analysis (for Coxem EM-30/EM-40).
- QUANTAX ED-XS (EDS + EBSD) – Standard package combining elemental and crystallographic analysis in one system (for Coxem EM-40/EM30/CX200/CX300).
- XFlash FlatQuad -3D EDS(Ciqtek).
- QUANTAX XFlash 730 30/60/100 EDS with ESPRIT Core – Advanced standalone EDS system optimized for demanding applications (Ciqtek).
Bruker EBSD Detectors for SEM

Bruker’s EBSD detectors deliver precise crystallographic information, phase identification, and grain mapping. The portfolio includes flexible systems for both routine and advanced research needs.
- eWARP – EBSD analysis module for advanced phase and orientation mapping.
- QUANTAX EBSD – Complete EBSD solution integrating hardware and ESPRIT software.
- QUANTAX ED-XS – EBSD+EDS Package for table-top and compact SEM’s
- ARGUS – Accessory for EBSD systems, enabling advanced forescatter imaging.
Micro-XRF Detectors on SEM
Bruker’s latest X-Ray source for scanning electron microscopes pushes capabilities of micro-XRF on SEM even further:Â
- Analyze light and heavy elements quickly with high energy X-rays.
- Determine small peaks in complex samples via selection of up to 6 filters.
- Scan topographic samples using a patented Aperture Management System.
- Accurately analyze powders via large spot size measurements.
- Automate your analysis process with motorized source insertion and retraction.

Software Packages for Bruker SEM Detectors
Bruker detectors are supported by the ESPRIT software suite, providing flexible and powerful analysis options for both EDS and EBSD workflows:
Standard quantitative EDS analysis
Advanced quantitative analysis with improved accuracy
Fast elemental quantification
High-speed quantitative mapping
Cathodoluminescence quantification module
Spectral matching for rapid identification
Advanced quantification package
Spectrum deconvolution for complex materials

Key Benefits of Bruker SEM Detectors

- Seamless integration with COXEM and CIQTEK SEM systems
- Full range of EDS and EBSD solutions for SEMs
- Options for tabletop and full size systems
- Combined EDS + EBSD packages for streamlined workflows
- Advanced ESPRIT software suite with multiple analysis modes
- Proven performance across materials science, semiconductors, and manufacturing
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