Oxford SEM Detectors | EDS & EBSD Solutions
Oxford Instruments offers a complete portfolio of EDS (Energy Dispersive Spectroscopy) and EBSD (Electron Backscatter Diffraction) detectors designed to integrate seamlessly with both tabletop and full-size SEMs. With industry-leading resolution, speed, and sensitivity, Oxford detectors support elemental analysis, crystallography, and microstructural mapping across materials science, semiconductor, geology, and manufacturing research.
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Oxford EDS Detectors for SEM
Oxford’s EDS detectors provide fast, accurate elemental analysis for a wide range of applications. Options are available for table top SEMs and full-size SEMs, ensuring the right solution for every workflow.
Oxford Xplore Compact 30/65 EDS – Compact EDS detectors optimized for tabletop SEMs, delivering reliable elemental analysis with high throughput.
Oxford Ultim Max Infinity EDS – Available in 40, 65, 100, and 170 mm² detector sizes, the Infinity series provides unmatched sensitivity and speed for advanced full-size SEM applications.
Oxford EBSD Detectors for SEM
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Oxford EBSD systems enable advanced crystallographic mapping and grain analysis for full-size SEMs. Designed for high-resolution, high-speed performance.
- Oxford C-Nano+ EBSD Detector – Entry-level EBSD solution offering robust phase and orientation mapping.
- Oxford C-Swift+ EBSD Detector – High-speed EBSD optimized for routine crystallographic analysis and large-area scans.
- Oxford Symmetry S3 EBSD Detector – Flagship EBSD system offering unparalleled acquisition speed and sensitivity for challenging materials.
Software Packages for Oxford SEM Detectors
Oxford detectors are powered by the AZtec software suite, providing intuitive interfaces and advanced analysis tools:
- AZtecONE – Simplified interface for users with little EDS knowledge and for those looking quick results
- AZtecLiveOne – Live elemental mapping and spectrum collection.
- AZtecLive – is designed for users who require more advanced functionality and flexibility
- AztecLiveLite – Complete package
- AZtecHKL – Advanced EBSD analysis platform for crystallography and grain orientation mapping.
Key Benefits of Oxford SEM Detectors
- Wide detector portfolio for table-top and full-size SEMs
- EDS and EBSD solutions for elemental and crystallographic analysis
- Scalable active areas from 15 mm² to 170 mm²
- Seamless integration with COXEM and CIQTEK SEM systems
- Supported by the powerful AZtec software ecosystem
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