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What Is Ion Milling? A Guide to SEM Sample Preparation Using Ion Beam Technology

Ion Beam Milling System inside part - Leica TIC3x
Ion Beam Milling System - Leica TIC3x

What is Ion Milling?

Ion milling is a precision sample preparation technique that uses a high-energy ion beam to remove surface material from a sample. It is especially useful for preparing samples for scanning electron microscopy (SEM) and analytical techniques such as EDS (energy-dispersive X-ray spectroscopy) and EBSD (electron backscatter diffraction).

This non-contact method helps reveal fine surface structures, eliminate mechanical polishing damage, and prepare smooth, artifact-free surfaces.

CP-8000+ Ion Beam Milling System for EM Sample Preparation
The Coxem CP-8000+ broad beam ion mill provides fast, damage-free cross-sectioning and flat milling—ideal for SEM, EBSD, and delicate or heat-sensitive materials.

Ion Milling vs. Focused Ion Beam (FIB)

There are two common types of ion beam milling systems:

 
  • Broad Beam Ion Milling: Uses a wide-area ion beam to uniformly etch large surface areas. Ideal for SEM prep and flat milling.
  • Focused Ion Beam (FIB) Milling: Uses a tightly focused beam to selectively mill very small regions. Common in failure analysis and TEM prep.

At JH Technologies, we primarily use broad beam ion milling systems to prepare cross-sections and surface finishes for high-resolution imaging.

What Types of Samples Can be Ion Milled?

Ion milling is versatile and works across a broad range of materials, including:

  • Electronics and semiconductors
  • Metals and alloys
  • Ceramics and composites
  • Polymers and soft materials
  • MEMS and multilayer devices

 

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Non-contact ion milling enables smooth, damage-free surfaces on delicate materials like polymers and composites—without smearing or deformation.

Key Benefits of Ion Milling for Sample Preparation

Ion milling offers several advantages over mechanical polishing and chemical etching:

  • Non-contact process: Avoids scratching, smearing, and deformation
  • Ideal for soft and delicate materials: Especially important for polymers and heat-sensitive samples
  • Improved EBSD performance: Produces flat, damage-free surfaces for better indexing
  • Cryogenic compatibility: Optional cooling stages prevent thermal damage
  • Excellent for composite samples: Polishes soft and hard materials side-by-side without smearing

 

Whether you’re preparing a solder joint, a polymer interface, or a cross-section of a MEMS device, ion milling helps preserve structural integrity and enhance imaging results.