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Ion Milling Equipment

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Broad beam ion milling machines for superior SEM Sample Preparation

Advanced Ion Beam Milling—The Coxem CP-8000+

Complete System Special Promotion

A complete ion milling system with flat milling capability for less than $99K.

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Fast—etching rate of 700 μm per hour (based on Si, 8 kV)

Efficient—save and load frequently used recipes

Automated—step-by-step recipes with an automatic execution function

Fast and easy sample loading with the smart sample holder and built-in digital microscope for ion beam sample alignment

Real-time status of ion beam and etching through chamber camera

Intuitive GUI with easy touch screen

Minimized thermal damage with the auto on/off ion beam function

Noise, vibration, oil-free operation

Large area plane etching capability with flat milling function

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ion milling machine - Coxem CP-8000+
CP-8000+

Affordable Ion Milling Equipment

The Coxem CP-8000+ is an argon ion beam polisher that simplifies cross-section sample analysis.

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Ion Milling Overview

ion milling machine - Coxem CP-8000+

Ion milling is a sample preparation technique that uses a beam of high-energy ions to remove material from a sample surface. Ion milling is widely used to prepare samples for SEM analysis, especially for EDS and EBSD.

What are the two types of broad beam ion mills?

There are two main ion milling techniques used today in sample preparation. Dual beam, also called Focused Ion Beam (FIB) milling, and large area ion beam milling (Broad Beam Ion Milling).

We use a broad beam ion milling machine to prepare samples for analysis in our lab.

Ion milling can be used to prepare a wide variety of samples, including electronics, metals, ceramics, polymers, and composites.

Benefits of Ion Milling for Sample Preparation

Because ion milling is a non-contact technique, it does not damage the sample surface and can be used to polish delicate and soft materials that would be damaged using mechanical polishing methods. Materials like polymers that cannot be mechanically polished due to ease of damage or cannot be exposed to heat can be polished using a cryogenic stage on the ion mill.

Samples mounted in ‘pucks” can be “flat milled” to remove surface damage from mechanical polishing and to prepare samples for EBSD.

Ion milling also works very well for soft materials that tend to smear or get inclusions when polished mechanically. This is highlighted when polishing electronic interfaces that have soft and hard materials right next to each other. Ion milling will remove smearing caused by regular polishing. This allows for better imaging, measurements, and elemental analysis.

 

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Ion Milling Equipment

Cross-Section Polisher - Coxem CP-8000

Advanced Ion Beam Cross Section Polisher—The Coxem CP-8000+

The CP-8000+ is an advanced cross-section polisher that etches a sample cross section using an argon ion beam. The ion milling process avoids physical deformation and structural damage, and does not require complicated chemical processes. In addition, the system simplifies cross-sectional analysis of the sample by processing large areas from tens of um to several mm.

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Ion Beam Milling System - Leica TIC3x

Triple Beam Ion Milling System—The Leica TIC 3X

The Leica EM TIC 3X is a triple ion beam milling system that enables the production of cross-sections and planed surfaces for scanning electron microscopy (SEM), microstructure analysis*, and AFM investigations.

*Microstructure analyses include energy dispersive X-ray spectroscopy (EDS), wavelength-dispersive X-ray spectroscopy (WDS), auger, and electron backscatter diffraction (EBSD).

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Target Surfacing System - Leica TXP

Leica TXP

The Leica EM TXP is a target preparation device for milling, sawing, grinding, and polishing samples prior to examination by SEM, TEM, and LM techniques.

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Ion Milling Videos

A Perfect Sample Preparation Finish

The COXEM CP-8000 Ion Mill Cross Section Polisher achieves a perfect finish when preparing sample cross sections for SEM imaging and analysis. The CP-8000 uses an argon beam to gently remove material from a sample's surface without smearing or deforming sample features.

Tried and True Ion Milling System

The Leica EM TIC 3X features three ion beams, a cooling stage, and multiple sample stages for your ion milling processes. The TIC 3X cuts broad and deep into the sample and creates smooth surfaces resulting in quality cross-sections for almost any material, quickly and easily.

Ion Beam Milling Applications

Lithium Battery Sample Preparation

Lithium Battery Sample Preparation

Buehler Tech Note: Lithium Battery Sample Preparation

Grain Analysis
Cryo Ion Milled Polymer Layers
solder joint ion milling

Electronic Materials / Structures

Ion Milling of solder joint shows off micro cracks

ion milling of a MEMS microphone

Ion Milling—Related Equipment and Accessories

Ion Milling Flat Stage

Ion Milling Flat Stage for Coxem CP-8000+ Ion Mill

Designed for plabe etching of large surfaces

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Cooling Stage

Cooling Stage TIC 3X

The cooling stage provides very low temperature processing for applications using polmers, rubber, food, cosmetic , pharmaceuticals, or heat sensitive metals

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Vacuum Transfer TIC 3X

VCT Vacuum Transfer Docking Station

A solution for environmentally sensitive samples

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