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Sample Positioning Stage​

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The EM-30 Series Tabletop Scanning Electron Microscopes are delivered with a standard motorized 3-axis stage for X/Y and Tilt. Working Distance or “Z” is very easy to set prior to closing the chamber and prevents accidental collisions by not having an external Z axis control.​

The Tilt function is useful for examining topography of flat samples. The Tilt function is compucentric such that the X axis is adjusted during tilt to maintain the specimen region of interest (ROI) in the field of view. The compucentric tilt function provides more versatility and time savings with its easier use especially for inexperienced users.​

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SAMPLE PRESENTATION​

Mounting samples is easily done using a variety of supplied sample holders that allow use of standard Pin Stubs of various sizes. Customized and standard sample holders from the various microscopy supply outlets can easily be adapted to the EM-30 Series stage.​

Several type of Multi-Pin holders allow convenient mounting of up to (9) stubs of 12.7mm. The holders can be easily adjusted for Z-height using their locknut thumbscrew to accommodate taller samples. Other sample holders such as small Vise Clamps or pre-tilt holders from various suppliers can easily be mounted, a few examples are shown to the right – LINK.​

Sample holder type is selected in the software which presents a Sample Map in the lower left of the interface making it very simple to change to different samples without losing track of which sample is being imaged. Alternately, the digital “NavCam” can be used to capture an image of the sample and/or holder to insert into this location.​

Adapters are also provided to allow attachment of any of your existing holders that have an M4 thread.

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SAMPLE POSITIONING STAGE​

The CX-200plus SEM is delivered with a standard 5-axis stage with automated “click and move” XYZRT sample positioning for the ultimate flexibility.

  • Control of the 5 directions is done thru the software interface
  • Uses the sample dimensions to prevent collisions with internal chamber accessories.

The Tilt function is extremely useful for examining the topography of flat samples.

  • Is compucentric such that the X axis is adjusted during tilt to maintain the specimen region of interest (ROI) in view
  • Provides more versatility and time savings with its easier use

The automatic controlled stage also enables the CX-200plus to offer a unique “Panorama” mode that allows the SEM to collect high-resolution images of large samples by controlling the motorized stage at higher magnifications.

Useful for applications such as details examination or metrology of semiconductors and electronic assemblies.​

The stage can handle large samples (up to 160mm) or sample holders for multiple samples. The observable area is 110mm.

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