Focused Ion Beam SEM (FIB-SEM)
The CIQTEK DB550 is an advanced Field Emission Scanning Electron Microscope (FE-SEM) with Focused Ion Beam (FIB) capabilities, offering comprehensive nano-analysis and fabrication in a single workstation. It features cutting-edge “super tunnel” electron optics technology, a Ga+ liquid metal ion source, and integrated systems for precise nano-scale research and manufacturing.
FIB-SEM Features
- Super tunnel electron optics technology: Innovative design that minimizes spatial charging and enables exceptional low-voltage resolution performance.
- High-precision gallium ion beam: Liquid metal ion source featuring ultra-precise nanofabrication capabilities, delivering resolution as fine as 3 nm.
- Integrated nano-manipulator: Advanced three-axis system with stepper motor accuracy down to 10 nm for sophisticated specimen positioning.
- Comprehensive gas injection system: Precise gas delivery coupled with controlled temperature and positioning for advanced material modification.
- Specimen exchange loadlock: 8-inch compatible design minimizing chamber contamination through efficient sample handling.
- Multi-mode advanced imaging detectors: Comprehensive detection systems for detailed material characterization across various imaging modes.
- Low-voltage, high-resolution imaging: Innovative lens design supporting superior imaging of non-conductive and sensitive materials.
- Cross-industry application versatility: Engineered for advanced research in semiconductors, new energy, materials science, and emerging technologies.
FIB-SEM Benefits
- Unprecedented nano-scale imaging and analysis capabilities
- High-resolution imaging across multiple voltage ranges
- Precise specimen preparation and manipulation
- Reduced spatial charging effects
- Improved lens aberration correction
- Compatibility with various sample types
- All-in-one nano-analysis and fabrication workstation
- Advanced semiconductor failure analysis
- Cross-section observation capabilities
- TEM specimen preparation
Software Capabilities & Accessories
- Integrated user-friendly GUI software
- Specimen characterization tools
- Cross-section analysis software
- Compatibility with multiple signal detection modes
- Micro-nano fabrication support
- Software Development Kit (SDK) available
- Optional image post-processing tools
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Detector Options:
- Everhart-Thornley Detector (ETD)
- In-lens Electron Detector
- Retractable Back-Scattered Electron Detector (BSED)
- Scanning Transmission Electron Microscopy (STEM) Detector
