SEM Detectors – EDS, EBSD, and Micro-XRF
EDS, EBSD, and Micro-XRF Solutions
Our portfolio covers tabletop and floor-model SEMs from Oxford Instruments and Bruker, with options for CIQTEK and COXEM systems.
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EDS (Energy Dispersive X-ray Spectroscopy): Rapid elemental analysis for material characterization, failure analysis, and process control.
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EBSD (Electron Backscatter Diffraction): Crystallographic orientation, grain size, and phase distribution for materials science and metallurgy.
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Micro-XRF (Micro X-ray Fluorescence): Elemental analysis of non-homogeneous, irregular, or small samples and inclusions.
EDS Detectors
For rapid and accurate elemental analysis, EDS detectors measure the X-rays emitted when your sample is hit by the SEM’s electron beam. Ideal for material characterization, failure analysis, and process control.
QUANTAX Compact30/60 – Entry-level desktop SEM EDS; 30mm²/60mm² active area; great for QA/QC.
Flash 7 – High-speed mapping; 30mm² or 60mm² active area; ideal for industrial throughput.
EDSX – Combined EDS + EBSD module for COXEM SEMs.
Explore Compact – For desktop SEMs; 30mm² or 65mm² active area; perfect for teaching labs and compact setups.
Explore – For floor-model SEMs; 65mm² active area; balances speed and versatility for R&D and industrial work.
Infinity – High-performance EDS; 40–170mm² active areas; optimized for trace element detection.
EBSD Detectors
Micro-XRF Detectors
For extended elemental range and trace element sensitivity.
Micro X-ray fluorescence spectrometry is the method of choice for the elemental analysis of non-homogeneous or irregularly shaped samples as well as small objects or even inclusions.
Why Choose Our SEM Detector Solutions?
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Options for desktop and floor-model SEMs
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Detector sizes from 30 mm² to 170 mm²
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Integration with Oxford Instruments or Bruker platforms
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Expert guidance help you match detectors to your application
SEM Detectors Software & Applications
We offer a complete range of detectors for scanning electron microscopes (SEM), including EDS (Energy Dispersive X-ray Spectroscopy), EBSD (Electron Backscatter Diffraction), and Micro-XRF solutions.
Our range includes desktop and floor-model solutions from Oxford Instruments and Bruker, as well as detectors designed specifically for CIQTEK and COXEM systems.