SEM Detectors – EDS, EBSD, and Micro-XRF

We offer detectors for scanning electron microscopes (SEM), including EDS, EBSD, and Micro-XRF solutions for elemental analysis, crystallographic mapping, and trace element detection in research, manufacturing, failure analysis, and quality control.

EDS, EBSD, and Micro-XRF Solutions

Our portfolio covers tabletop and floor-model SEMs from Oxford Instruments and Bruker, with options for CIQTEK and COXEM systems.

  • EDS (Energy Dispersive X-ray Spectroscopy): Rapid elemental analysis for material characterization, failure analysis, and process control.

  • EBSD (Electron Backscatter Diffraction): Crystallographic orientation, grain size, and phase distribution for materials science and metallurgy.

  • Micro-XRF (Micro X-ray Fluorescence): Elemental analysis of non-homogeneous, irregular, or small samples and inclusions.

EDS Detectors

For rapid and accurate elemental analysis, EDS detectors measure the X-rays emitted when your sample is hit by the SEM’s electron beam. Ideal for material characterization, failure analysis, and process control.

EBSD Detectors

For crystallographic mapping, grain size measurement, and phase analysis.

Micro-XRF Detectors

For extended elemental range and trace element sensitivity.

Micro X-ray fluorescence spectrometry is the method of choice for the elemental analysis of non-homogeneous or irregularly shaped samples as well as small objects or even inclusions.

Why Choose Our SEM Detector Solutions?

  • Options for desktop and floor-model SEMs

  • Detector sizes from 30 mm² to 170 mm² 

  • Integration with Oxford Instruments or Bruker platforms

  • Expert guidance help you match detectors to your application

SEM Detectors Software & Applications

We offer a complete range of detectors for scanning electron microscopes (SEM), including EDS (Energy Dispersive X-ray Spectroscopy), EBSD (Electron Backscatter Diffraction), and Micro-XRF solutions.

Our range includes desktop and floor-model solutions from Oxford Instruments and Bruker, as well as detectors designed specifically for CIQTEK and COXEM systems.

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