JH Technologies Partners with Evactron
We are proud to announce our partnership with Evactron the leader in high-performance plasma cleaning systems, helping to produce the best SEM images possible.
- RF Power: 5 to 16W continuous
- Energy efficient radio frequency hollow cathode plasma (RFHC)
- Compact PRS – WxHxD: 2.5”x2.125”x3.75” (6.3×5.4×9.5cm)
- Programmable ignition power, cleaning power, cycle time, number of cycles
- Power Centre controller – WxHxD: 12.25”x3.5”x9.34”(31×8.9×23.7cm)
- Touchpad programming of cleaning recipes
- Wide range of pressure operation: 1 Torr to 1.0 E-3 Torr
- Fixed input air flow rate, no adjustments needed
- Turbo pump compatible
- PRS can be flush-mounted on the chamber or the load lock
- No match or gas flow adjustments needed for plasma ignition
- TÜV, NRTL and CE safety certified
The Evactron system uses low-pressure reactive gases to remove organic and inorganic contaminants from the surface of materials. The cleaner provides a dry and residue-free cleaning process and can be used for different applications such as microscopy, electronics, and nanotechnology.
We will be using the tool as part of our preventative maintenance service to clean SEM chambers and remove hydrocarbons and other materials. A clean vacuum chamber helps produce the best imaging and analysis results. We will also be offering the tool as part of our table-top SEM packages for those customers that have higher volumes and need in-house capability.
- Remote hollow cathode plasma radical source
- Desktop controller with pushbutton operation
- Android tablet with Bluetooth communication
- Library of tested recipes and options to change power, cycles, length of cleaning, etc.
- Chassis dimensions WxHxD: 17” x 3.4” x 6.7” (43 cm x 8.6 cm x 17 cm)
- RF Power: 35 – 75 Watts at 13.56 MHz RFHC
- 100-240 VAC 50/60 HZ input
- RoHS, CE, NRTL, TUV and SEMI S2 compliant
Evactron plasma cleaners are user-friendly and easy to operate. They come with a touch screen interface that allows users to set up and monitor the cleaning process. Moreover, its compact design makes it ideal for use in small laboratories or cleanrooms.
Overall, Evactron plasma cleaners provide a reliable and efficient solution for cleaning vacuum chambers. Their advanced technology and user-friendly interface make it a valuable tool for researchers and manufacturers who need precise and consistent results.
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